ロングテック株式会社
product
DLC Coated DSP Carrier
DLC coated DSP carriers are specifically used for 300mm silicon wafer polishing, benefit from its extreme hardness, brilliant abrasive resistance, and exclusive properties of MOE
(Modulus of Elasticity)/COF(Coefficient of Friction), etc.
FEATURES
- Body Materials: Stainless steel / Carbon steel
- Insert Materials: Polyamide; PVDF Combination of stainless steel strength and polymer carrier strength
- No Metal Contamination
- DLC blocks off metals coming out from steel or carbon body
- Coating Thickness: 2.5±1μm
- High Hardness: 2000HV
- Friction Coefficient: 0.045
- Improving wafer performance on TTV / TIR
CONTACT US
Tel.06-6123-1110
Business Hours: 10:00-18:00
Closed: Saturday & Sunday